Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
Päätekijät: | , , , , , , , |
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Aineistotyyppi: | Journal article |
Julkaistu: |
2012
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Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
Julkaistu 2012
Journal article