Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
主要な著者: | , , , , , , , |
---|---|
フォーマット: | Journal article |
出版事項: |
2012
|
Search Result 1
Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
出版事項 2012
Journal article