Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

書誌詳細
主要な著者: Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A
フォーマット: Journal article
出版事項: 2012