Vertically oriented epitaxial germanium nanowires on silicon substrates using thin germanium buffer layers
We demonstrate a method to realize vertically oriented Ge nanowires on Si(111) substrates. Ge nanowires were grown by chemical vapor deposition using Au nanoparticles to seed nanowire growth via a vapor-liquid-solid growth mechanism. Rapid oxidation of Si during Au nanoparticle application inhibits...
Main Authors: | , , , , , , , , , , , |
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Format: | Journal article |
Language: | English |
Published: |
2010
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