Depth sectioning using electron energy loss spectroscopy
The continued development of electron probe aberration correctors for scanning transmission electron microscopy has enabled finer electron probes, allowing atomic resolution column-by-column electron energy loss spectroscopy. Finer electron probes have also led to a decrease in the probe depth of fo...
| Principais autores: | , , , , , , |
|---|---|
| Formato: | Conference item |
| Publicado em: |
2008
|