Data in support of Impact of precursor dosing on the surface passivation of AZO/AlOx stacks formed using atomic layer deposition
All data reported in publication: Impact of precursor dosing on the surface passivation of AZO/AlOx stacks formed using atomic layer deposition
Hauptverfasser: | , , , , , , , , , , , , , |
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Format: | Dataset |
Sprache: | English |
Veröffentlicht: |
University of Oxford
2025
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