Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging

Electron channelling contrast imaging (ECCI) has been used to image misfit dislocations between single epitaxial layers (epilayers) of In0·2Ga0·8As grown on GaAs (001). Bulk specimens of the as-grown material were examined over a range of epilayer thickness from 25 to 3000 nm. Spectral analysis of E...

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Príomhchruthaitheoir: Wilkinson, A
Formáid: Journal article
Foilsithe / Cruthaithe: 1996
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author Wilkinson, A
author_facet Wilkinson, A
author_sort Wilkinson, A
collection OXFORD
description Electron channelling contrast imaging (ECCI) has been used to image misfit dislocations between single epitaxial layers (epilayers) of In0·2Ga0·8As grown on GaAs (001). Bulk specimens of the as-grown material were examined over a range of epilayer thickness from 25 to 3000 nm. Spectral analysis of ECCI intensity traces was used to establish whether strain fields from the individual dislocations overlapped. Significant overlapping of strain fields was first observed at an epilayer thickness of 100nm which corresponds well to the onset of macroscopic strain relaxation.
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spelling oxford-uuid:922159cd-8cf0-4de0-852e-2d05fa967e342022-03-26T23:23:25ZObservation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imagingJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:922159cd-8cf0-4de0-852e-2d05fa967e34Symplectic Elements at Oxford1996Wilkinson, AElectron channelling contrast imaging (ECCI) has been used to image misfit dislocations between single epitaxial layers (epilayers) of In0·2Ga0·8As grown on GaAs (001). Bulk specimens of the as-grown material were examined over a range of epilayer thickness from 25 to 3000 nm. Spectral analysis of ECCI intensity traces was used to establish whether strain fields from the individual dislocations overlapped. Significant overlapping of strain fields was first observed at an epilayer thickness of 100nm which corresponds well to the onset of macroscopic strain relaxation.
spellingShingle Wilkinson, A
Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging
title Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging
title_full Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging
title_fullStr Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging
title_full_unstemmed Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging
title_short Observation of strain distributions in partially relaxed In0.2Ga0.8As on GaAs using electron channelling contrast imaging
title_sort observation of strain distributions in partially relaxed in0 2ga0 8as on gaas using electron channelling contrast imaging
work_keys_str_mv AT wilkinsona observationofstraindistributionsinpartiallyrelaxedin02ga08asongaasusingelectronchannellingcontrastimaging