SILICON-OXIDE EPITAXIAL-FILMS INVESTIGATED BY NEUTRON REFLECTIVITY
Two samples consisting of silicon oxide layers, of different thicknesses, on a crystalline silicon substrate have been investigated using the technique of neutron reflectivity. By simulating the neutron reflectivity from a theoretical scattering length density profile, and altering the profile so th...
| Main Authors: | , , , , , |
|---|---|
| Format: | Journal article |
| Published: |
1989
|