Nanoscale phase transformation in Ge2Sb2Te5 using encapsulated scanning probes and retraction force microscopy.
Encapsulated conducting probes that can sustain high currents are used to study the nanoscale properties of thin-film stacks comprising of a phase-change chalcogenide, Ge(2)Sb(2)Te(5). Scaling studies on this promising candidate for random-access memory devices had thus far required extensive lithog...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2009
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