METAL DEPOSITION ON SILICON: IN SITU SURFACE STUDIES.
In order to investigate surface chemistry in greater detail an approach has been adopted whereby thin film formation is examined in situ using the powerful techniques of surface science. In this abstract the results of pyrolytic, photolytic and electron beam deposition studies of Fe from Fe(CO)//5 o...
| Main Authors: | , |
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| Format: | Journal article |
| Language: | English |
| Published: |
Materials Research Soc
1984
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