Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering

A transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically...

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Main Authors: Cosgriff, E, D'Alfonso, A, Allen, L, Findlay, S, Kirkland, A, Nellist, P
Format: Journal article
Language:English
Published: Elsevier 2008
Subjects:
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author Cosgriff, E
D'Alfonso, A
Allen, L
Findlay, S
Kirkland, A
Nellist, P
author_facet Cosgriff, E
D'Alfonso, A
Allen, L
Findlay, S
Kirkland, A
Nellist, P
author_sort Cosgriff, E
collection OXFORD
description A transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically scattered electrons. It is shown that there is no linear phase contrast in the confocal condition, leading to very low contrast for a single atom. Multislice simulations of a thicker crystalline sample show that sample vertical location and thickness can be accurately determined. However, buried impurity layers do not give strong, nor readily interpretable contrast. The accompanying paper examines the detection of inelastically scattered electrons in the confocal geometry.
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spelling oxford-uuid:98bfa6e1-ef7e-4b00-8a42-b59ff2952a522022-03-27T00:09:14ZThree-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scatteringJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:98bfa6e1-ef7e-4b00-8a42-b59ff2952a52Materials SciencesPhysicsEngineering & allied sciencesEnglishOxford University Research Archive - ValetElsevier2008Cosgriff, ED'Alfonso, AAllen, LFindlay, SKirkland, ANellist, PA transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically scattered electrons. It is shown that there is no linear phase contrast in the confocal condition, leading to very low contrast for a single atom. Multislice simulations of a thicker crystalline sample show that sample vertical location and thickness can be accurately determined. However, buried impurity layers do not give strong, nor readily interpretable contrast. The accompanying paper examines the detection of inelastically scattered electrons in the confocal geometry.
spellingShingle Materials Sciences
Physics
Engineering & allied sciences
Cosgriff, E
D'Alfonso, A
Allen, L
Findlay, S
Kirkland, A
Nellist, P
Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering
title Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering
title_full Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering
title_fullStr Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering
title_full_unstemmed Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering
title_short Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering
title_sort three dimensional imaging in double aberration corrected scanning confocal electron microscopt part i elastic scattering
topic Materials Sciences
Physics
Engineering & allied sciences
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