ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100)
| Hlavní autoři: | , |
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| Médium: | Journal article |
| Vydáno: |
1986
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| _version_ | 1826286661570396160 |
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| author | Jackman, R Foord, J |
| author_facet | Jackman, R Foord, J |
| author_sort | Jackman, R |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-07T01:47:03Z |
| format | Journal article |
| id | oxford-uuid:98c53dc8-265c-4841-9ba1-32a09d8ab88a |
| institution | University of Oxford |
| last_indexed | 2024-03-07T01:47:03Z |
| publishDate | 1986 |
| record_format | dspace |
| spelling | oxford-uuid:98c53dc8-265c-4841-9ba1-32a09d8ab88a2022-03-27T00:09:19ZELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100)Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:98c53dc8-265c-4841-9ba1-32a09d8ab88aSymplectic Elements at Oxford1986Jackman, RFoord, J |
| spellingShingle | Jackman, R Foord, J ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100) |
| title | ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100) |
| title_full | ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100) |
| title_fullStr | ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100) |
| title_full_unstemmed | ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100) |
| title_short | ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100) |
| title_sort | electron beam stimulated chemical vapor deposition of patterned tungsten films on si 100 |
| work_keys_str_mv | AT jackmanr electronbeamstimulatedchemicalvapordepositionofpatternedtungstenfilmsonsi100 AT foordj electronbeamstimulatedchemicalvapordepositionofpatternedtungstenfilmsonsi100 |