ELECTRON-BEAM STIMULATED CHEMICAL VAPOR-DEPOSITION OF PATTERNED TUNGSTEN FILMS ON SI(100)
Váldodahkkit: | Jackman, R, Foord, J |
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Materiálatiipa: | Journal article |
Almmustuhtton: |
1986
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Geahča maid
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THERMAL AND PHOTOCHEMICAL VAPOR-DEPOSITION OF FE FROM FE(CO)5 ON SI(100)
Dahkki: Jackman, R, et al.
Almmustuhtton: (1989) -
CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES
Dahkki: Foord, J, et al.
Almmustuhtton: (1984) -
LASER CHEMICAL VAPOR-DEPOSITION OF PATTERNED FE ON SILICA GLASS - OBSERVATION AND ORIGINS OF PERIODIC RIPPLE STRUCTURES
Dahkki: Jackman, R, et al.
Almmustuhtton: (1986) -
Chemical vapor deposition of tungsten and tungsten silicides : for VLSI/ULSI applications
Dahkki: 439284 Schmitz, John E. J.
Almmustuhtton: (1992) -
DIAMOND CHEMICAL-VAPOR-DEPOSITION FROM A CAPACITIVELY COUPLED RADIO-FREQUENCY PLASMA
Dahkki: Jackman, R, et al.
Almmustuhtton: (1995)