Chemical and structural investigations of the interactions of Cu with MnSiO3 diffusion barrier layers
X-ray photoelectron spectroscopy (XPS) has been used to investigate the thermodynamic stability of Cu layers deposited onto Mn silicate (MnSiO 3) barrier layers formed on SiO 2 surfaces. Using a fully in situ growth and analysis experimental procedur...
| Main Authors: | , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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