Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity
We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2010
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