Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity
We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied...
| Main Authors: | , , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
2010
|
| _version_ | 1797085401422233600 |
|---|---|
| author | Thiruvenkatanathan, P Yan, J Woodhouse, J Aziz, A Seshia, A |
| author_facet | Thiruvenkatanathan, P Yan, J Woodhouse, J Aziz, A Seshia, A |
| author_sort | Thiruvenkatanathan, P |
| collection | OXFORD |
| description | We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%. © 2010 American Institute of Physics. |
| first_indexed | 2024-03-07T02:08:28Z |
| format | Journal article |
| id | oxford-uuid:9fcd11af-06c2-402b-a716-b9feca83659a |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-07T02:08:28Z |
| publishDate | 2010 |
| record_format | dspace |
| spelling | oxford-uuid:9fcd11af-06c2-402b-a716-b9feca83659a2022-03-27T02:00:40ZUltrasensitive mode-localized mass sensor with electrically tunable parametric sensitivityJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:9fcd11af-06c2-402b-a716-b9feca83659aEnglishSymplectic Elements at Oxford2010Thiruvenkatanathan, PYan, JWoodhouse, JAziz, ASeshia, AWe use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%. © 2010 American Institute of Physics. |
| spellingShingle | Thiruvenkatanathan, P Yan, J Woodhouse, J Aziz, A Seshia, A Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity |
| title | Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity |
| title_full | Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity |
| title_fullStr | Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity |
| title_full_unstemmed | Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity |
| title_short | Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity |
| title_sort | ultrasensitive mode localized mass sensor with electrically tunable parametric sensitivity |
| work_keys_str_mv | AT thiruvenkatanathanp ultrasensitivemodelocalizedmasssensorwithelectricallytunableparametricsensitivity AT yanj ultrasensitivemodelocalizedmasssensorwithelectricallytunableparametricsensitivity AT woodhousej ultrasensitivemodelocalizedmasssensorwithelectricallytunableparametricsensitivity AT aziza ultrasensitivemodelocalizedmasssensorwithelectricallytunableparametricsensitivity AT seshiaa ultrasensitivemodelocalizedmasssensorwithelectricallytunableparametricsensitivity |