Topographical, compositional, and dopant contrast from cleavage surfaces of GaAs-AlxGa1-xAs superlattices

We present images of (110) cleavage surfaces of GaAs-AlxGa1-xAs superlattices obtained by scanning force microscopy (SFM) and field-emission scanning electron microscopy. Topographical information is mapped by secondary electrons (SEs) and SFM, compositional differences are imaged through SEs and ba...

Descrición completa

Detalles Bibliográficos
Main Authors: Castell, M, Perovic, D, Howie, A, Ritchie, D, Lavoie, C, Tiedje, T
Formato: Conference item
Publicado: 1995