Realization of high mobility p-type co-doped ZnO: AlN film with a high density of nitrogen-radicals
High mobility p-type ZnO:AlN thin films have been efficiently realized by utilizing pre-activated nitrogen (N) plasma sources with an inductively coupled dual target co-sputtering system. High density of N-plasma-radicals was generated with an additional RF power applied through a ring-shaped quartz...
| Main Authors: | , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2009
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