Polycrystalline silicon field emitters
Field emission of electrons from polycrystalline silicon tips has been investigated. Two process routes, wet and dry etching, were used to form the tips and their structures were compared using a transmission electron microscope (TEM). TEM micrographs of the wet-etched polysilicon tips show the pres...
| Main Authors: | , , , , |
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| Format: | Conference item |
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IEEE
1995
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