On the micromechanics of micro-cantilever sensors: property analysis and eigenstrain modeling
Micro-cantilevers can be utilized as sensors primarily due to their low stiffness/high flexibility and high resonance frequency. The cantilever system is therefore very sensitive to small changes of properties that can be detected either as change of deflection, or of resonance frequency. The develo...
| Main Authors: | , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
Elsevier
2007
|
| Subjects: |