AN INVESTIGATION OF THE ADSORPTION AND DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)

AN INVESTIGATION OF THE ADSORPTION AND DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)

The adsorption and thermal decomposition of PH3 and NH3 on the Ga-rich GaAs(100)-(4 × 1) surface has been studied using temperature programmed desorption (TPD), Auger electron spectroscopy (AES) and high resolution electron loss spectroscopy (HREELS) techniques. At room temperature PH3 was found to...

書誌詳細
主要な著者:	Singh, N, Murrell, A, Foord, J
フォーマット:	Journal article
言語:	English
出版事項:	1992

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