AN INVESTIGATION OF THE ADSORPTION AND DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)

AN INVESTIGATION OF THE ADSORPTION AND DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)

The adsorption and thermal decomposition of PH3 and NH3 on the Ga-rich GaAs(100)-(4 × 1) surface has been studied using temperature programmed desorption (TPD), Auger electron spectroscopy (AES) and high resolution electron loss spectroscopy (HREELS) techniques. At room temperature PH3 was found to...

書目詳細資料
Main Authors:	Singh, N, Murrell, A, Foord, J
格式:	Journal article
語言:	English
出版:	1992

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