AN INVESTIGATION OF THE ADSORPTION AND DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)
The adsorption and thermal decomposition of PH3 and NH3 on the Ga-rich GaAs(100)-(4 × 1) surface has been studied using temperature programmed desorption (TPD), Auger electron spectroscopy (AES) and high resolution electron loss spectroscopy (HREELS) techniques. At room temperature PH3 was found to...
| 主要な著者: | , , |
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| フォーマット: | Journal article |
| 言語: | English |
| 出版事項: |
1992
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