LASER CHEMICAL VAPOR-DEPOSITION OF PATTERNED FE ON SILICA GLASS - OBSERVATION AND ORIGINS OF PERIODIC RIPPLE STRUCTURES

Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser-driven dissociation of iron pentacarbonyl vapor. The structure of the deposited films has been studied using optical, electron, and scanning Auger microscopic techniques. Extensive i...

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Bibliographic Details
Main Authors: Jackman, R, Foord, J, Adams, A, Lloyd, M
Format: Journal article
Language:English
Published: 1986