LASER CHEMICAL VAPOR-DEPOSITION OF PATTERNED FE ON SILICA GLASS - OBSERVATION AND ORIGINS OF PERIODIC RIPPLE STRUCTURES
Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser-driven dissociation of iron pentacarbonyl vapor. The structure of the deposited films has been studied using optical, electron, and scanning Auger microscopic techniques. Extensive i...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1986
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| Summary: | Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser-driven dissociation of iron pentacarbonyl vapor. The structure of the deposited films has been studied using optical, electron, and scanning Auger microscopic techniques. Extensive iron silicate formation is observed at the iron-glass interface and 50-μm periodic ripples are formed in the delineated deposits. The origin of the periodic structure is discussed with reference to the available analytical data and observations from related laser processing studies. |
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