LASER CHEMICAL VAPOR-DEPOSITION OF PATTERNED FE ON SILICA GLASS - OBSERVATION AND ORIGINS OF PERIODIC RIPPLE STRUCTURES
Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser-driven dissociation of iron pentacarbonyl vapor. The structure of the deposited films has been studied using optical, electron, and scanning Auger microscopic techniques. Extensive i...
| المؤلفون الرئيسيون: | , , , |
|---|---|
| التنسيق: | Journal article |
| اللغة: | English |
| منشور في: |
1986
|