Nanoelectromechanical switch with low voltage drive

Nanoelectromechanical switch with low voltage drive

The triode structure vertical carbon nanotube based nanoelectromechanical switch shows excellent low voltage drive (∼4.5 V), owing to its vertical gate and the narrow gap between structural elements. The insulator deposition and the selective etching process steps simplify fabrication through self-a...

Полное описание

Библиографические подробности
Главные авторы:	Jang, J, Cha, S, Choi, Y, Butler, T, Kang, D, Hasko, D, Jung, J, Jin, Y, Kim, J, Amaratunga, G
Формат:	Journal article
Язык:	English
Опубликовано:	2008

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