CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES
| Main Authors: | , |
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| Format: | Journal article |
| Published: |
1984
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| _version_ | 1826290749489020928 |
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| author | Foord, J Jackman, R |
| author_facet | Foord, J Jackman, R |
| author_sort | Foord, J |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-07T02:48:57Z |
| format | Journal article |
| id | oxford-uuid:ad01ee3c-471c-4065-9910-eaadaf1b1e19 |
| institution | University of Oxford |
| last_indexed | 2024-03-07T02:48:57Z |
| publishDate | 1984 |
| record_format | dspace |
| spelling | oxford-uuid:ad01ee3c-471c-4065-9910-eaadaf1b1e192022-03-27T03:32:40ZCHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIESJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:ad01ee3c-471c-4065-9910-eaadaf1b1e19Symplectic Elements at Oxford1984Foord, JJackman, R |
| spellingShingle | Foord, J Jackman, R CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES |
| title | CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES |
| title_full | CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES |
| title_fullStr | CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES |
| title_full_unstemmed | CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES |
| title_short | CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES |
| title_sort | chemical vapor deposition on silicon insitu surface studies |
| work_keys_str_mv | AT foordj chemicalvapordepositiononsiliconinsitusurfacestudies AT jackmanr chemicalvapordepositiononsiliconinsitusurfacestudies |