Scanning optical microscopy of semiconductor devices
<p>This thesis explores the interaction of light and semiconductors using a scanning optical microscope. A key advantage to this approach is its non-destructiveness. This is a critical factor in the assurance of semiconductor device reliability. This research investigates novel ways in which t...
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| Drugi avtorji: | |
| Format: | Thesis |
| Jezik: | English |
| Izdano: |
1987
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| Teme: |