Scanning optical microscopy of semiconductor devices
<p>This thesis explores the interaction of light and semiconductors using a scanning optical microscope. A key advantage to this approach is its non-destructiveness. This is a critical factor in the assurance of semiconductor device reliability. This research investigates novel ways in which t...
Үндсэн зохиолчид: | , |
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Бусад зохиолчид: | |
Формат: | Дипломын ажил |
Хэл сонгох: | English |
Хэвлэсэн: |
1987
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Нөхцлүүд: |