Scanning optical microscopy of semiconductor devices

<p>This thesis explores the interaction of light and semiconductors using a scanning optical microscope. A key advantage to this approach is its non-destructiveness. This is a critical factor in the assurance of semiconductor device reliability. This research investigates novel ways in which t...

Бүрэн тодорхойлолт

Номзүйн дэлгэрэнгүй
Үндсэн зохиолчид: McCabe, E, McCabe, Eithne
Бусад зохиолчид: Wilson, T
Формат: Дипломын ажил
Хэл сонгох:English
Хэвлэсэн: 1987
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