Scanning optical microscopy of semiconductor devices
<p>This thesis explores the interaction of light and semiconductors using a scanning optical microscope. A key advantage to this approach is its non-destructiveness. This is a critical factor in the assurance of semiconductor device reliability. This research investigates novel ways in which t...
Main Authors: | McCabe, E, McCabe, Eithne |
---|---|
Other Authors: | Wilson, T |
Format: | Thesis |
Language: | English |
Published: |
1987
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Subjects: |
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