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{111} defects in 1-MeV-silicon...
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{111} defects in 1-MeV-silicon-ion-implanted silicon.
Bibliographic Details
Main Authors:
Chou, C
,
Cockayne, D
,
Zou, J
,
Kringhoj, P
,
Jagadish, C
Format:
Journal article
Language:
English
Published:
1995
Holdings
Description
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