Transmission electron microscopy characterization of secondary defects created by MeV Si, Ge, and Sn implantation in silicon

Bibliografiska uppgifter
Huvudupphovsmän:	Wong-Leung, J, Fatima, S, Jagadish, C, Gerald, F, Chou, C, Zou, J, Cockayne, D
Materialtyp:	Journal article
Publicerad:	2000

Liknande verk