Optimisation of sample preparation and analysis conditions for atom probe tomography characterisation of low concentration surface species
The practicalities for atom probe tomography (APT) analysis of near-surface chemistry, particularly the distribution of low concentration elements, are presented in detail. Specifically, the challenges of surface analysis using APT are described through the characterisation of near-surface implantat...
Main Authors: | , , , , |
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Format: | Journal article |
Published: |
IOP Publishing
2016
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