Contrast in atomically resolved EF-SCEM imaging.

Energy-filtered scanning confocal electron microscopy (EF-SCEM) is a technique that uses the reduced depth of field of an aberration-corrected transmission electron microscope to provide three-dimensional (3D) compositional information. Using a silicon sample in the <110> orientation,...

詳細記述

書誌詳細
主要な著者: Wang, P, D'Alfonso, A, Hashimoto, A, Morgan, A, Takeguchi, M, Mitsuishi, K, Shimojo, M, Kirkland, A, Allen, L, Nellist, P
フォーマット: Journal article
言語:English
出版事項: 2013