Device fabrication in high-index 3D photonic crystals
Holographic lithography (HL) is a flexible technique for the fabrication of three-dimensional (3D) photonic crystals with the submicron periodicity required for optical and near-IR applications. We demonstrate two key steps towards the creation of integrated optical devices based on waveguides and m...
| Main Authors: | , , , , , , , , |
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| Format: | Conference item |
| Published: |
2006
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