Device fabrication in high-index 3D photonic crystals

Holographic lithography (HL) is a flexible technique for the fabrication of three-dimensional (3D) photonic crystals with the submicron periodicity required for optical and near-IR applications. We demonstrate two key steps towards the creation of integrated optical devices based on waveguides and m...

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Main Authors: Roche, O, Scrimgeour, J, King, J, Sharp, D, Blanford, C, Graugnard, E, Denning, R, Summers, C, Turberfield, A
格式: Conference item
出版: 2006
_version_ 1826294421657747456
author Roche, O
Scrimgeour, J
King, J
Sharp, D
Blanford, C
Graugnard, E
Denning, R
Summers, C
Turberfield, A
author_facet Roche, O
Scrimgeour, J
King, J
Sharp, D
Blanford, C
Graugnard, E
Denning, R
Summers, C
Turberfield, A
author_sort Roche, O
collection OXFORD
description Holographic lithography (HL) is a flexible technique for the fabrication of three-dimensional (3D) photonic crystals with the submicron periodicity required for optical and near-IR applications. We demonstrate two key steps towards the creation of integrated optical devices based on waveguides and microcavities operating within a complete photonic band gap: 1) infiltration of a holographically-defined polymeric 3D photonic crystal template with high-index dielectric by Atomic Layer Deposition (ALD) [1]; and 2) creation of localised structural defects embedded in, and in registration with, a 3D photonic crystal by direct two-photon laser writing [2], Structural and optical characterisation of TiO2 photonic crystals produced by infiltration and removal of the polymer template demonstrates the high quality of the negative replica. Structural characterisation of photonic crystals with embedded defects shows a faithful rendering of the designed structure in the developed polymer photonic crystal. The combination of these three techniques (HL, two-photon writing and ALD) maps out a clear route to device fabrication in high-index 3D photonic crystals.
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spelling oxford-uuid:bf4a22c5-d9b7-4e6c-a038-ded0e31f951f2022-03-27T05:46:20ZDevice fabrication in high-index 3D photonic crystalsConference itemhttp://purl.org/coar/resource_type/c_5794uuid:bf4a22c5-d9b7-4e6c-a038-ded0e31f951fSymplectic Elements at Oxford2006Roche, OScrimgeour, JKing, JSharp, DBlanford, CGraugnard, EDenning, RSummers, CTurberfield, AHolographic lithography (HL) is a flexible technique for the fabrication of three-dimensional (3D) photonic crystals with the submicron periodicity required for optical and near-IR applications. We demonstrate two key steps towards the creation of integrated optical devices based on waveguides and microcavities operating within a complete photonic band gap: 1) infiltration of a holographically-defined polymeric 3D photonic crystal template with high-index dielectric by Atomic Layer Deposition (ALD) [1]; and 2) creation of localised structural defects embedded in, and in registration with, a 3D photonic crystal by direct two-photon laser writing [2], Structural and optical characterisation of TiO2 photonic crystals produced by infiltration and removal of the polymer template demonstrates the high quality of the negative replica. Structural characterisation of photonic crystals with embedded defects shows a faithful rendering of the designed structure in the developed polymer photonic crystal. The combination of these three techniques (HL, two-photon writing and ALD) maps out a clear route to device fabrication in high-index 3D photonic crystals.
spellingShingle Roche, O
Scrimgeour, J
King, J
Sharp, D
Blanford, C
Graugnard, E
Denning, R
Summers, C
Turberfield, A
Device fabrication in high-index 3D photonic crystals
title Device fabrication in high-index 3D photonic crystals
title_full Device fabrication in high-index 3D photonic crystals
title_fullStr Device fabrication in high-index 3D photonic crystals
title_full_unstemmed Device fabrication in high-index 3D photonic crystals
title_short Device fabrication in high-index 3D photonic crystals
title_sort device fabrication in high index 3d photonic crystals
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AT turberfielda devicefabricationinhighindex3dphotoniccrystals