Device fabrication in high-index 3D photonic crystals
Holographic lithography (HL) is a flexible technique for the fabrication of three-dimensional (3D) photonic crystals with the submicron periodicity required for optical and near-IR applications. We demonstrate two key steps towards the creation of integrated optical devices based on waveguides and m...
| Main Authors: | , , , , , , , , |
|---|---|
| Formato: | Conference item |
| Publicado em: |
2006
|