Polycrystalline silicon field emitters

Polycrystalline silicon field emitters

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Field emission of electrons from polycrystalline silicon micropoint emitters has been investigated. Two process routes, wet and dry etching, were used to form emitters, and their morphologies were compared using a transmission electron microscope (TEM). TEM micrographs of the wet-etched polysilicon...

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Dades bibliogràfiques
Autors principals:	Boswell, E, Huq, SE, Huang, M, Prewett, P, Wilshaw, P
Format:	Conference item
Publicat:	1996

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