Polycrystalline silicon field emitters
Field emission of electrons from polycrystalline silicon micropoint emitters has been investigated. Two process routes, wet and dry etching, were used to form emitters, and their morphologies were compared using a transmission electron microscope (TEM). TEM micrographs of the wet-etched polysilicon...
| Main Authors: | , , , , |
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| Format: | Conference item |
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1996
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