Polycrystalline silicon field emitters

Field emission of electrons from polycrystalline silicon micropoint emitters has been investigated. Two process routes, wet and dry etching, were used to form emitters, and their morphologies were compared using a transmission electron microscope (TEM). TEM micrographs of the wet-etched polysilicon...

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Bibliografische gegevens
Hoofdauteurs:	Boswell, E, Huq, SE, Huang, M, Prewett, P, Wilshaw, P
Formaat:	Conference item
Gepubliceerd in:	1996

Polycrystalline silicon field emitters door Boswell, E, Huq, SE, Huang, M, Prewett, P, Wilshaw, P

Gepubliceerd in 1995

Conference item

Polycrystalline silicon field emitters

Polycrystalline silicon field emitters door Boswell, E, Huq, SE, Huang, M, Prewett, P, Wilshaw, P

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