Real time STM observation of Au-assisted decomposition of SiO2 films on Si(111) at elevated temperatures
The decomposition of ultrathin layers of SiO2 on Si(1 1 1) has been studied in real time in a high temperature scanning tunnelling microscope. Deposition of Au onto the SiO2 surface lowers the temperature of decomposition from 1000 to 940 K. Film decomposition takes place initially at step edges. Th...
| Váldodahkkit: | , , , |
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| Materiálatiipa: | Journal article |
| Giella: | English |
| Almmustuhtton: |
2002
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