$Characterization of nitride thin films by electron backscatter diffraction and electron channeling contrast imaging$

Characterization of nitride thin films by electron backscatter diffraction and electron channeling contrast imaging

In this paper we describe the use of electron backscatter diffraction (EBSD) mapping and electron channeling contrast imaging - in the scanning electron microscope - to study tilt, atomic steps and dislocations in epitaxial GaN thin films. We show results from epitaxial GaN thin films and from a jus...

Full description

Bibliographic Details
Main Authors:	Trager-Cowan, C, Sweeney, F, Wilkinson, A, Trimby, P, Day, A, Gholinia, A, Schmidt, N, Parbrook, P, Watson, I
Format:	Journal article
Language:	English
Published:	2006

Similar Items

Electron backscatter diffraction and electron channeling contrast imaging of tilt and dislocations in nitride thin films
by: Trager-Cowan, C, et al.
Published: (2007)

Characterisation of nitride thin films by electron backscatter diffraction and electron channelling contrast imaging
by: Trager-Cowan, C, et al.
Published: (2006)

Electron channeling and ion channeling contrast imaging of dislocations in nitride thin films
by: Trager-Cowan, C, et al.
Published: (2008)

High-resolution electron backscatter diffraction in III-nitride semiconductors
by: Vilalta-Clemente, A, et al.
Published: (2015)

Determination of the structural and luminescence properties of nitrides using electron backscattered diffraction and photo- and cathodoluminescence
by: Trager-Cowan, C, et al.
Published: (2002)

Characterisation of epitaxial lateral overgrown GaN by electron backscatter diffraction correlated with cross-sectional cathodoluminescence spectroscopy
by: Sweeney, F, et al.
Published: (2006)

Cross-correlation based high resolution electron backscatter diffraction and electron channelling contrast imaging for strain mapping and dislocation distributions in InAlN thin films
by: Wilkinson, A, et al.
Published: (2016)

Strain mapping using electron backscatter diffraction
by: Wilkinson, A, et al.
Published: (2009)

Methods for determining elastic strains from electron backscatter diffraction and electron channelling patterns
by: Wilkinson, A
Published: (1997)

Direct detection of electron backscatter diffraction patterns.
by: Wilkinson, A, et al.
Published: (2013)

Quantitative imaging of anti-phase domains by polarity sensitive orientation mapping using electron backscatter diffraction
by: Naresh-Kumar, G, et al.
Published: (2017)

Measurement of plastic strain of polycrystalline material by electron backscatter diffraction
by: Kamaya, M, et al.
Published: (2005)

Elastic strain tensor measurement using electron backscatter diffraction in the SEM.
by: Dingley, D, et al.
Published: (2010)

High resolution mapping of strains and rotations using electron backscatter diffraction
by: Wilkinson, A, et al.
Published: (2013)

High resolution mapping of strains and rotations using electron backscatter diffraction
by: Wilkinson, A, et al.
Published: (2006)

High-resolution electron backscatter diffraction: an emerging tool for studying local deformation
by: Wilkinson, A, et al.
Published: (2010)

Analysis of dislocation densities using high resolution electron backscatter diffraction
by: Vilalta-Clemente, A, et al.
Published: (2015)

BACKSCATTERED ELECTRON CONTRAST ON CROSS-SECTIONS OF INTERFACES AND MULTILAYERS IN THE SCANNING ELECTRON-MICROSCOPE
by: Konkol, A, et al.
Published: (1995)

Rapid electron backscatter diffraction mapping: painting by numbers
by: Tong, V, et al.
Published: (2018)

Electron Backscatter Diffraction: An Important Tool for Analyses of Structure-Property Relationships in Thin-Film Solar Cells
by: Abou-Ras, D, et al.
Published: (2013)

Electron backscatter diffraction: An important tool for analyses of structure-property relationships in thin-film solar cells
by: Abou-Ras, D, et al.
Published: (2013)

Quantification of plastic strain of stainless steel and nickel alloy by electron backscatter diffraction
by: Kamaya, M, et al.
Published: (2006)

Measurement of residual elastic strain and lattice rotations with high resolution electron backscatter diffraction.
by: Britton, T, et al.
Published: (2011)

The effect of pattern overlap on the accuracy of high resolution electron backscatter diffraction measurements.
by: Tong, V, et al.
Published: (2015)

Microstrain distribution mapping on CuInSe2 thin films by means of electron backscatter diffraction, X-ray diffraction, and Raman microspectroscopy.
by: Schäfer, N, et al.
Published: (2016)

Quantitative simulations of electron channelling patterns and electron backscattering from crystals
by: Dudarev, S, et al.
Published: (1994)

Factors affecting the accuracy of high resolution electron backscatter diffraction when using simulated patterns.
by: Britton, T, et al.
Published: (2010)

Applications of multivariate statistical methods and simulation libraries to analysis of electron backscatter diffraction and transmission Kikuchi diffraction datasets
by: Wilkinson, A, et al.
Published: (2018)

Decoherence in electron backscattering by kinked dislocations.
by: Dudarev, S, et al.
Published: (1999)

Decoherence in electron backscattering by kinked dislocations
by: Dudarev, S, et al.
Published: (1999)

High resolution measurements of strain and tilt distributions in SiGe mesas using electron backscatter diffraction
by: Wilkinson, A
Published: (2006)

High resolution measurements of strain and tilt distributions in SiGe mesas using electron backscatter diffraction
by: Wilkinson, A
Published: (2006)

Probing deformation and revealing microstructural mechanisms with cross-correlation-based, high-resolution electron backscatter diffraction
by: Britton, T, et al.
Published: (2013)

High resolution electron backscatter diffraction measurements of elastic strain variations in the presence of larger lattice rotations.
by: Britton, T, et al.
Published: (2012)

Measurement of fatigue crack plastic zones in fine grained materials using electron backscattered diffraction
by: Tucker, A, et al.
Published: (2000)

Measurement of fatigue crack plastic zones in fine grained materials using electron backscattered diffraction
by: Tucker, A, et al.
Published: (2000)

An iterative method for reference pattern selection in high-resolution electron backscatter diffraction (HR-EBSD)
by: Koko, A, et al.
Published: (2023)

Assessing the precision of strain measurements using electron backscatter diffraction--part 1: detector assessment.
by: Britton, T, et al.
Published: (2013)

Assessing the precision of strain measurements using electron backscatter diffraction--part 2: experimental demonstration.
by: Britton, T, et al.
Published: (2013)

Assessing the precision of strain measurements using electron backscatter diffraction - part 1: Detector assessment
by: Britton, T, et al.
Published: (2013)