Compositional nonuniformities in pulsed laser atom probe tomography analysis of compound semiconductors
The unidirectional laser illumination of atom probe tomography specimens can result in changes of the apex morphology from nearly hemispherical to asymmetrical with different local radii of curvature, implying an anisotropic field distribution across the sample surface. In the analysis of III-V semi...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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