MODULATED MOLECULAR-BEAM MASS-SPECTROMETRY STUDIES OF THE GROWTH OF GAAS AND INXGA1-XAS USING TRI-ISOBUTYLGALLIUM

MODULATED MOLECULAR-BEAM MASS-SPECTROMETRY STUDIES OF THE GROWTH OF GAAS AND INXGA1-XAS USING TRI-ISOBUTYLGALLIUM

Modulated molecular beam mass spectroscopy (MBMS) studies of the CBE growth of GaAs and InxGa1-xAs using tri-isobutylgallium (TiBG) have been carried out. The results show similarities to studies which have been carried out previously using triethylgallium (TEG) in that hey indicate that the GRa dep...

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Hauptverfasser:	Levoguer, C, Foord, J, Davies, G, Skevington, P
Format:	Conference item
Veröffentlicht:	Elsevier 1994

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