Exploitation of nonlinear effects in micro-electromechanical resonators
Microelectromechanical Systems (MEMS) are well developed in various fields benefiting from the rapid improvement of fabrication technology. Because of the low cost, small mass and high frequency, micromechanical resonators are of great interest to be used in the sensing technology. The mass change o...
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| フォーマット: | 学位論文 |
| 言語: | English |
| 出版事項: |
2011
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