The properties of nitrogen and oxygen in silicon
A novel dislocation locking technique is used to study the behaviour of nitrogen and oxygen in silicon. Specimens containing well-defined arrays of dislocation half-loops are subjected to isothermal anneals of controlled duration, during which nitrogen or oxygen diffuses to the dislocations. The str...
Những tác giả chính: | , |
---|---|
Tác giả khác: | |
Định dạng: | Luận văn |
Ngôn ngữ: | English |
Được phát hành: |
2006
|
Những chủ đề: |