A novel source of atomic hydrogen for passivation of defects in silicon
Palladium membranes have been used for decades for the separation of hydrogen from other gasses. In this letter the use of thin palladium leaves to act as sources of atomic hydrogen for silicon samples is explored. It has been assumed in the past that although hydrogen diffuses through palladium in...
| Glavni autori: | , , , , , |
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| Format: | Journal article |
| Izdano: |
Wiley
2017
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