Contrast in atomically resolved EF-SCEM imaging
Energy-filtered scanning confocal electron microscopy (EF-SCEM) is a technique that uses the reduced depth of field of an aberration-corrected transmission electron microscope to provide three-dimensional (3D) compositional information. Using a silicon sample in the <110> orientation,...
Հիմնական հեղինակներ: | , , , , , , , , , |
---|---|
Ձևաչափ: | Journal article |
Լեզու: | English |
Հրապարակվել է: |
2013
|