Surface figure measurement of flat mirrors based on the subaperture stitching interferometry
Large flat mirrors can be characterized using a standard interferometer coupled with stitching the subaperture measurement data. Such systems can measure the global full map of the optical surface by minimizing the inconsistency of data in the adjacent regions. We present a stitching technique that...
| Main Authors: | , , , , , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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