Understanding metal organic chemical vapour deposition of monolayer WS2: the enhancing role of au substrate for simple organosulfur precursors
We find that the use of Au substrate allows fast, self-limited WS2 mono-layer growth using a simple sequential exposure pattern of low cost, low toxicity precursors, namely tungsten hexacarbonyl and dimethylsulfide (DMS). We use this model reaction system to fingerprint the technologically important...
| Main Authors: | , , , , , , , , , , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
Royal Society of Chemistry
2020
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